Vacuum Pumps & related accessories
Dry Scroll Vacuum Pump - DVSL Series
DVSL-100C
DVSL-500C/501C
- DVSL scroll pump is equipped with dry vacuum system without using lubricating oil or sealing water.
- No gears result in no need to exchange of gear oil and no risk of leaked lubricating oil.
- Easy – maintenance available.
- Generated clean vacuum keeps installation area clean.
- Equipped cooling system frees from the trouble of controlling cooling water and selecting installation site.
- Excellence in displacing water vapor.
- Reliable Design – Little power variance between atmospheric pressure and the ultimate pressure allows repeated continuous operation between atmospheric pressure and vacuum.
- Standard equipped hour meter enables easy daily operation. Only supplied with DVSL-500C / 501C.
- Excellence in energy-savings in vacuum area. 24 hrs operations secured.
Dry Scroll Vacuum Pump - ISP Series
ISP-50, ISP-90, ISP-250C, ISP-50, ISP-500C, ISP-1000
ISP series of vacuum pumps offer a clean vacuum environment and eliminate the nuisance of cumbersome lubricant maintenance or sealing water administration. ISP is free from installation restrictions because of its air-cooled system. ISP maintains low power consumption from atmosphere to maximum pressure. Maximum pressure is 1[Pa] High reliability.
- Sputtering equipment, Vacuum deposition equipment, Ion plating equipment
- Gas recovery devices
- Leak detectors
- Device Handling system
- Surface modification, Electron beam process
- Vacuum furnace, Heat treatment furnace
- Laboratory use
- Vacuum packaging machine
- Others